ASAHI KASEIFIBERS have developed nanofiber nonwoven filter “EUTEC NANO KPX Series”of φ0.3 μm fiber and 0.2〜0.3μm pore size, which is finest in commercially available filters. ASAHI KASEI FIBERS intend to put the filter on market by September, 2014. Its application is thought to filter gel-like particles from resist or film materials or to remove the aggregates in particle slurry liquids of abrading agents, inks and electrodes. The filter has a high potential to remove fine gel-like particles by maintaining high pore ratio without collapsing fibers. The filtering efficiency is 99.5 % in the case of 0.2μm pore size, and 99.5 % in the case of 0.3μm pore size. The filtration can be done with lower pressure loss even for high viscous liquid, which is difficult to filter through membrane.

JCFA News Letter (No.8) June, 2014/Japan Chemical Fibers Association